Mr. Raoul Kirner
at SUSS MicroOptics SA
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | September 27, 2016
Proc. SPIE. 9951, Optical System Alignment, Tolerancing, and Verification X
KEYWORDS: Superposition, Lithography, Point spread functions, Microlens array, Imaging systems, Microlens, Photomasks, Imaging arrays, Semiconducting wafers, Multichannel imaging systems

PROCEEDINGS ARTICLE | May 13, 2013
Proc. SPIE. 8788, Optical Measurement Systems for Industrial Inspection VIII
KEYWORDS: Confocal microscopy, Prisms, Light sources, Imaging systems, Sensors, Spectroscopy, Multiplexing, Colorimetry, Detector arrays, RGB color model

PROCEEDINGS ARTICLE | March 5, 2013
Proc. SPIE. 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI
KEYWORDS: Wafer-level optics, Lithography, Optical lithography, Lithographic illumination, Micro optics, Photomasks, Neodymium, Molybdenum, Semiconducting wafers, Submicron lithography

PROCEEDINGS ARTICLE | December 18, 2012
Proc. SPIE. 8550, Optical Systems Design 2012
KEYWORDS: Confocal microscopy, Hyperspectral imaging, Chromatic aberrations, Monochromatic aberrations, Point spread functions, Imaging systems, Sensors, Colorimetry, Spectral resolution, Sensing systems

PROCEEDINGS ARTICLE | May 5, 2012
Proc. SPIE. 8429, Optical Modelling and Design II
KEYWORDS: Refractive index, Metrology, Statistical analysis, Speckle, Cameras, Glasses, Light scattering, Free space, Speckle pattern, Diffusers

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