Raul A. Ramirez
Business Unit Director at Entegris Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 16 April 2011
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Lithography, Optical lithography, Materials processing, Manufacturing, Photoresist materials, Semiconducting wafers, Wafer testing, Photoresist developing, Industrial chemicals, Bottom antireflective coatings

Proceedings Article | 31 March 2010
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Lithography, Chemistry, Manufacturing, Control systems, Scanning electron microscopy, Immersion lithography, Manufacturing equipment, Photomicroscopy, Semiconducting wafers, Filtering (signal processing)

Proceedings Article | 31 March 2010
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Lithography, Data modeling, Particles, Materials processing, Manufacturing, Intelligence systems, Semiconducting wafers, Product engineering, Process engineering, Liquids

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