Dr. Ravi R. Pai
Chairman and Managing Director at Mentor Graphics (Sales and Services) Private Ltd
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 8 November 2012
Proc. SPIE. 8522, Photomask Technology 2012
KEYWORDS: Defect detection, Opacity, Inspection, Image registration, Photomasks, Charge-coupled devices, SRAF, Critical dimension metrology, Semiconducting wafers, Defect inspection

Proceedings Article | 8 November 2012
Proc. SPIE. 8522, Photomask Technology 2012
KEYWORDS: Cadmium, Data modeling, Modulation, Scattering, Manufacturing, Laser scattering, Photomasks, SRAF, Data corrections, Process modeling

Proceedings Article | 14 October 2011
Proc. SPIE. 8166, Photomask Technology 2011
KEYWORDS: Defect detection, Detection and tracking algorithms, Imaging systems, Cameras, Image processing, Inspection, Image registration, CCD cameras, Photomasks, Charge-coupled devices

Proceedings Article | 14 October 2011
Proc. SPIE. 8166, Photomask Technology 2011
KEYWORDS: Visualization, Manufacturing, Computing systems, Data processing, Software development, Critical dimension metrology, Line edge roughness, Photomask technology, Standards development, Vestigial sideband modulation

Proceedings Article | 27 May 2010
Proc. SPIE. 7748, Photomask and Next-Generation Lithography Mask Technology XVII
KEYWORDS: Data modeling, Data storage, Image processing, Scanners, Inspection, Field programmable gate arrays, Photomasks, Image storage, Prototyping, Defect inspection

Proceedings Article | 23 September 2009
Proc. SPIE. 7488, Photomask Technology 2009
KEYWORDS: Detection and tracking algorithms, Detector arrays, Software development, Bismuth, Associative arrays, Optical proximity correction, Data conversion, Photomask technology, Electronic design automation, Current controlled current source

Showing 5 of 10 publications
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