Dr. Rayan M. Alassaad
SPIE Involvement:
Author
Publications (4)

SPIE Journal Paper | 1 January 2008
JM3 Vol. 7 Issue 01
KEYWORDS: Polymers, Polymethylmethacrylate, Scatterometry, Nanostructures, Reflectivity, Electron beam lithography, Scanning electron microscopy, Nanoimprint lithography, Visible radiation, Cadmium sulfide

Proceedings Article | 5 April 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Electron beam lithography, Metrology, Polymethylmethacrylate, Polymers, Error analysis, Silicon, Reflectivity, Scanning electron microscopy, Scatterometry, Nanoimprint lithography

Proceedings Article | 16 July 2002
Proc. SPIE. 4689, Metrology, Inspection, and Process Control for Microlithography XVI
KEYWORDS: Semiconductors, Lithography, Diffraction, Optical design, Metrology, Error analysis, Reflectivity, Scatterometry, Structural design, Diffraction gratings

Proceedings Article | 12 July 2002
Proc. SPIE. 4692, Design, Process Integration, and Characterization for Microelectronics
KEYWORDS: Wafer-level optics, Diffraction, Optical design, Error analysis, Reflectivity, Control systems, Scatterometry, Critical dimension metrology, Structural design, Scatter measurement

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