Dr. Pei-Shiang Chen
Team Member at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 19 March 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Electron beam lithography, Scattering, Scanners, Silicon, Distortion, Thermal effects, Finite element methods, Silicon carbide, Semiconducting wafers, Thermal modeling

Proceedings Article | 4 April 2011
Proc. SPIE. 7970, Alternative Lithographic Technologies III
KEYWORDS: Optical fibers, Electron beam lithography, Data transmission, Maskless lithography, Raster graphics, Mask making, Critical dimension metrology, Electron beam direct write lithography, Semiconducting wafers, Tolerancing

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