Raymond M. Copenhaver
at Geost Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 29 March 1999
Proc. SPIE. 3619, Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays
KEYWORDS: Mirrors, Beam splitters, Phase shifting, Metrology, Interferometers, Sensors, Data acquisition, Zernike polynomials, Shape analysis, Aluminum

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