Relationships between subsurface damage (SSD) depth and peak to valley surface roughness (<i>Rt</i>) have been widely studied and present a major interest for an easy assessment of the SSD depth. We seek the relation between SSD depth and other surface roughness parameters using the Abbott-Firestone curve on a large campaign of grinding tests (with different abrasive grain size, grinding speed and grinding mode). The results reveal that the Abbott-Firestone parameter <i>Mr2</i>, which can be linked to the volume fraction of valley in the roughness profile, is more accurate than <i>Rt</i> for an assessment of the SSD depth and that the relationship between Mr2 and the SSD depth varies when changing the grinding mode.
During the development of the laser megajoule (LMJ), a high power laser facility dedicated to DT fusion, CEA has made
important efforts to understand and improve laser induced damage threshold of fused silica optics at the wavelength of
351 nm. For several years, with various industrials and academics partners, we have focused on optimizing the grinding,
lapping and polishing processes to increase materials performance. In this paper, we describe our efforts in various
fields: subsurface damage characterization, lapping process simulation, diamond grinding and lapping machine
instrumentations, ... Our concern is to control and manage the material removal at each step of the process in order to
reduce the cracks region extension and thus to diminish the damage density.