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Dr. Raúl Pecharromán-Gallego
at IBEO Automotive Eindhoven B.V.
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Author
Publications (1)
Proceedings Article | 16 October 2017 Presentation
EUV exposure tool stability at IMEC (Conference Presentation)
Vinayan Menon, Raul Pecharroman-Gallego, Lieve van Look , Eric Hendrickx, Andre van Dijk, Tom Lathouwers
Proceedings Volume 10450, 1045015 (2017) https://doi.org/10.1117/12.2281623
KEYWORDS: Extreme ultraviolet lithography, Extreme ultraviolet, Lithography, Scanners, Manufacturing, High volume manufacturing, Optical lithography, Lithographic illumination, EUV optics
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