Dr. Rebecca Mih
Director at Lam Research Corp
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 22 January 2001 Paper
Proc. SPIE. 4186, 20th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Lithography, Metals, Manufacturing, Inspection, Photomasks, Optical proximity correction, Mask making, Computer aided design, Photoresist processing, Semiconducting wafers

Proceedings Article | 26 July 1999 Paper
Proc. SPIE. 3679, Optical Microlithography XII
KEYWORDS: Oxides, Carbon, Lithography, Etching, Metals, Dielectrics, Silicon, Reflectivity, Photoresist materials, Photomasks

Proceedings Article | 29 June 1998 Paper
Proc. SPIE. 3333, Advances in Resist Technology and Processing XV
KEYWORDS: Lithography, Deep ultraviolet, Polymers, Ultraviolet radiation, Energy transfer, Resistance, Photoresist materials, Microelectronics, Absorbance, Chemically amplified resists

Proceedings Article | 7 July 1997 Paper
Proc. SPIE. 3051, Optical Microlithography X
KEYWORDS: Lithography, Calibration, Semiconducting wafers, Overlay metrology, Phase shifts

Proceedings Article | 7 June 1996 Paper
Proc. SPIE. 2726, Optical Microlithography IX
KEYWORDS: Lithography, Monochromatic aberrations, Reticles, Metrology, Calibration, Process control, Photoresist processing, Semiconducting wafers, Overlay metrology, Phase shifts

Showing 5 of 7 publications
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