Prof. Redouane Borsali
Glycopolymer Physico-Chemistry Group Leader at CERMAV-CNRS
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Proc. SPIE. 11612, Advances in Patterning Materials and Processes XXXVIII
KEYWORDS: Silicon, Reactive ion etching, Plasma, Optical lithography, FT-IR spectroscopy, Etching, Scanning electron microscopy, Reflectometry, Reflectance spectroscopy, Polymers

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