Reiji Kanaya
at Nikon Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 18 March 2015 Paper
Reiji Kanaya, Koichi Fujii, Motokatsu Imai, Tomoyuki Matsuyama, Takao Tsuzuki, Qun Ying Lin
Proceedings Volume 9426, 94261O (2015) https://doi.org/10.1117/12.2085606
KEYWORDS: 3D modeling, Photomasks, Wavefronts, Projection systems, Diffraction, Computer simulations, Finite-difference time-domain method, Optical lithography, Lithography, Lithographic illumination

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top