Dr. Reika Katsumata
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Semiconductors, Polymers, Dewetting, Copper, Coating, Thin film coatings, Self-assembled monolayers

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Chemical species, Polymers, Annealing, Ions, Silicon, Diffusion, Doping, Boron, Antimony, Polymer thin films

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Semiconductors, Chemical species, Polymers, Annealing, Silicon, Coating, Doping, Boron, Semiconducting wafers, Polymer thin films

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