Dr. Reinhard März
at JCMwave GmbH
SPIE Involvement:
Author
Publications (16)

Proceedings Article | 5 April 2011
Proc. SPIE. 7974, Design for Manufacturability through Design-Process Integration V
KEYWORDS: Lithography, Multilayers, Polishing, Metals, Manufacturing, Pollution control, Design for manufacturing, Analog electronics, Americium, Design for manufacturability

Proceedings Article | 4 March 2008
Proc. SPIE. 6925, Design for Manufacturability through Design-Process Integration II
KEYWORDS: Lithography, Metals, Particles, Manufacturing, Design for manufacturing, Antennas, Connectors, Optics manufacturing, Yield improvement, Virtual colonoscopy

Proceedings Article | 4 March 2008
Proc. SPIE. 6925, Design for Manufacturability through Design-Process Integration II
KEYWORDS: Lithography, Cadmium, Calibration, Silicon, Doping, Transistors, Field effect transistors, Analog electronics, Resolution enhancement technologies, Chemical mechanical planarization

Proceedings Article | 21 March 2007
Proc. SPIE. 6521, Design for Manufacturability through Design-Process Integration
KEYWORDS: Lithography, Calibration, 3D modeling, Scanning electron microscopy, Printing, Design for manufacturing, Semiconducting wafers, Prototyping, Process modeling, Resolution enhancement technologies

Proceedings Article | 20 October 2006
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Lithography, Diffraction, Polarization, Image processing, Computer simulations, Finite element methods, Photomasks, Chemical elements, Photoresist processing, Airborne remote sensing

Showing 5 of 16 publications
Proceedings Volume Editor (1)

SPIE Conference Volume | 6 August 1998

Conference Committee Involvement (3)
Integrated Optics: Devices, Materials, and Technologies X
23 January 2006 | San Jose, California, United States
Integrated Optics: Devices, Materials, and Technologies IX
24 January 2005 | San Jose, California, United States
Fiber Optic Components and Optical Communication II
18 September 1998 | Beijing, China
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