Dr. Reinhard Voelkel
CEO at SUSS MicroOptics SA
SPIE Involvement:
Fellow status | Senior status | Conference Program Committee | Author
Area of Expertise:
micro-optics , fiber , illumination , wafer-level optics , optical interconnects , lithography
Profile Summary

More than 30 years experience in Optics, Micro-Optics, Optical Communication, Imaging Systems, Microtechnology, MEMS, Bio-MEMS, Sensors and Semiconductor Manufacturing Technology.

General Management, Technology Management, Research & Development, Strategic Planning, Business Development, Project and Program Management, Relationship Development, Intellectual Property, Quality Assurance, Problem Resolution, Communications, Technical Publications and Presentations.

Technical: Photonics, Nanotechnology, Engineering, Micro-Optical Elements, Microlens Arrays, Optical Design, Optical Interconnections, Fiber Optics, Telecom, Datacom, Silicon Photonics, Optical Bio-Chips, Chemical Micro-Chips, Optical Sensors, Metrology, MEMS, MOEMS, Bio-MEMS, Microfluidic, Laser, Med-Tech, Data Sciences, Big Data, Miniaturized Cameras, Ultra-Flat Cameras, Wafer-Level Cameras, Wafer-Level Packaging, Wafer-Based Micro-Fabrication.
Publications (69)

Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Lithography, Continuous wave operation, Microlens array, Lithographic illumination, Diffractive optical elements, Semiconductor lasers, Diffusers, Light sources and illumination, Beam shaping, 193nm lithography

Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Lithography, Light sources, Continuous wave operation, Lithographic illumination, Crystals, Semiconductor lasers, Diffusers, Photomasks, Beam shaping, Semiconducting wafers

PROCEEDINGS ARTICLE | February 15, 2018
Proc. SPIE. 10511, Solid State Lasers XXVII: Technology and Devices
KEYWORDS: Lithography, Continuous wave operation, Deep ultraviolet, Crystals, Laser applications, Semiconductor lasers, Photomasks, Laser crystals, Nonlinear crystals, Laser systems engineering

PROCEEDINGS ARTICLE | February 27, 2017
Proc. SPIE. 10120, Complex Light and Optical Forces XI
KEYWORDS: Diffraction, Modulation, Polarization, Interferometry, Electromagnetic radiation, Computer simulations, Near field, Distance measurement, Near field diffraction, Objectives, Singular optics, Electromagnetism, Nanofabrication, Radio propagation, Diffraction gratings

PROCEEDINGS ARTICLE | February 20, 2017
Proc. SPIE. 10116, MOEMS and Miniaturized Systems XVI
KEYWORDS: Microelectromechanical systems, Optical components, Diffraction, Optical spheres, Scattering, Lenses, Glasses, Near field, Refraction, Photonics, Micro optics, Microlens, Geometrical optics

PROCEEDINGS ARTICLE | September 27, 2016
Proc. SPIE. 9951, Optical System Alignment, Tolerancing, and Verification X
KEYWORDS: Superposition, Lithography, Point spread functions, Microlens array, Imaging systems, Microlens, Photomasks, Imaging arrays, Semiconducting wafers, Multichannel imaging systems

Showing 5 of 69 publications
Conference Committee Involvement (13)
Optical Fabrication, Testing, and Metrology VI
15 May 2018 | Frankfurt, Germany
Digital Optics for Immersive Displays (DOID18)
24 April 2018 | Strasbourg, France
3D Printed Optics and Additive Photonic Manufacturing
23 April 2018 | Strasbourg, France
Optical Microlithography XXXI
27 February 2018 | San Jose, California, United States
Digital Optical Technologies
26 June 2017 | Munich, Germany
Showing 5 of 13 published special sections
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