Dr. Rémi Rivière
Optical performance engineer at
SPIE Involvement:
Author
Area of Expertise:
straylight , space optics , spectroscopy , laser , photolithography , front-end of line
Profile Summary

2006: Master in Physics Engineering, University of Toulouse
2011: PhD in Quantum Optics, Max Planck Institute for Quantum Optics, Munich
2012-2016: Photolithography Engineer, GlobalFoundries, Dresden
Since September 2016: Optical Performance Engineer, Airbus Defence and Space, Munich.
Current role: performance analysis with strong emphasize on straylight on the Sentinel-4 UV/visible/NIR geostationary atmosphere spectrometer.
Publications (2)

PROCEEDINGS ARTICLE | October 8, 2014
Proc. SPIE. 9235, Photomask Technology 2014
KEYWORDS: Reticles, Opacity, Chromium, Photoresist materials, Photomasks, Optical proximity correction, Critical dimension metrology, Semiconducting wafers, Binary data, Front end of line

PROCEEDINGS ARTICLE | September 9, 2013
Proc. SPIE. 8880, Photomask Technology 2013
KEYWORDS: Reticles, Data modeling, Metals, 3D modeling, Photomasks, Optical proximity correction, Electron beam melting, Critical dimension metrology, Semiconducting wafers, Binary data

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