Renatus Sikorski
at Infineon Technologies AG
SPIE Involvement:
Publications (5)

Proceedings Article | 28 August 2003 Paper
Proc. SPIE. 5130, Photomask and Next-Generation Lithography Mask Technology X
KEYWORDS: Reticles, Particles, Interfaces, Yield improvement, Data analysis

Proceedings Article | 16 August 2002 Paper
Proc. SPIE. 4764, 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents
KEYWORDS: Reticles, Databases, Etching, Dry etching, Particles, Laser applications, Inspection, Chromium, Scanning electron microscopy, Photomasks

Proceedings Article | 26 February 2001 Paper
Proc. SPIE. 4205, Advanced Environmental and Chemical Sensing Technology
KEYWORDS: Polyurethane, Sensors, Polymers, Luminescence, Molecules, Fluorescence spectroscopy, Polymerization, Chemical analysis, Liquids, Chemical fiber sensors

Proceedings Article | 18 November 1999 Paper
Proc. SPIE. 3857, Chemical Microsensors and Applications II
KEYWORDS: Gold, Sensors, Quartz, Molecules, Dielectrics, Hydrogen, Adsorption, Liquid crystals, Chemical analysis, Self-assembled monolayers

Proceedings Article | 18 December 1998 Paper
Proc. SPIE. 3539, Chemical Microsensors and Applications
KEYWORDS: Resonators, Sensors, Quartz, Polymers, Luminescence, Molecules, Transducers, Chemical analysis, Signal detection, Polymeric sensors

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