The optical control study works on both the optical and the microwave behaviours of the plasma photo-induced in the semiconductor enlightened by a laser beam. The presented study is based on the necessity to be able to foresee the microwave response of CPW microwave devices versus different optical powers and different kinds of optical fibers, single-mode or multimode. The optical part has been achieved analytically by solving the diffusion equation of photo-induced carriers using the Hankel transform in 3-Dimensions. The added value of this technique is its precision and fastness. For the electromagnetic part we have chosen to use CST Microwave Studio software, which solves numerically Maxwell's equations with a Finite Integration Technique (FIT). For this aim we have had to model the photo-induced load using the locally changed conductivity directly depending of the excess carriers distribution. In the final paper, the first part will deal with the analytical computation of the photo-induced excess carrier in silicon substrate using the Hankel transform under permanent enlightening. Then the explanation of the model will be based on the need of a 3-Dimension model that may be described in an electromagnetic software. Finally simulation results of simple CPW devices as stub will be compared to measurements. In conclusion, we will show that the model is suitable for designing more complex devices and that it can be simplified in case of low precision needs.