VESPERS beamline is a hard X-ray microprobe beamline dedicated to micro-diffraction and micro-fluorescence analysis at the Canadian Light Source; it requires multi-bandpass X-ray beams for different types of samples and experiments. A specially designed double crystal/multilayer monochromator was built for this purpose with three
different bandpasses: 0.01%, 1.6% and 10%. The diffraction elements used for the monochromator have a triple-stripe design using Si(111) crystal as a single substrate with two differing stripes of Mo/B<sub>4</sub>C multilayers deposited thereon. The uncovered Si(111) section provides a 0.01% bandpass, while the periodic and depth-graded Mo/B<sub>4</sub>C multilayers provide 1.6% and 10% bandpasses, respectively. This paper outlines the requirements and specifications of the diffracting elements as well as the design, deposition and optimization of the multilayers. The performance of the deposited multilayer structures has been tested using Cu-Kα radiation line with a Huber diffractometer.