Renjin Shao
at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | November 20, 2012
Proc. SPIE. 8564, Nanophotonics and Micro/Nano Optics
KEYWORDS: Nanostructures, Antireflective coatings, Nanoparticles, Etching, Metals, Annealing, Silicon, Silver, Reactive ion etching, Nanolithography

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