Dr. Rex B. Anderson
Research Engineer at Micross Components Inc
SPIE Involvement:
Publications (7)

Proceedings Article | 17 December 2003 Paper
Scott Anderson, Rex Anderson, Melisa Buie, Madhavi Chandrachood, Jason Clevenger, Yvette Lee, Nicole Sandlin, Jian Ding
Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.518231
KEYWORDS: Etching, Reactive ion etching, Photomasks, Quartz, Ions, Phase measurement, Plasma, Phase shifts, Diffractive optical elements, Statistical analysis

Proceedings Article | 17 December 2003 Paper
Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.519625
KEYWORDS: Etching, Critical dimension metrology, Photomasks, Reticles, Data modeling, Semiconducting wafers, Prototyping, Dry etching, Diffractive optical elements, Chlorine

Proceedings Article | 17 December 2003 Paper
Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.519188
KEYWORDS: Principal component analysis, Etching, Signal to noise ratio, Chromium, Calibration, Spectroscopy, Photomasks, Charge-coupled devices, Photoresist processing, Neural networks

Proceedings Article | 28 August 2003 Paper
Rex Anderson, Guenther Ruhl, Pavel Nesladek, Gerhard Prechtl, Winfried Sabisch, Alfred Kersch, Melisa Buie
Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504199
KEYWORDS: Etching, Chlorine, Critical dimension metrology, Oxygen, Photomasks, Plasma etching, Plasma, Data centers, Chromium, Manufacturing

Proceedings Article | 28 May 2003 Paper
Proceedings Volume 5148, (2003) https://doi.org/10.1117/12.515073
KEYWORDS: Etching, Photomasks, Molybdenum, Phase shifts, Quartz, Fluorine, Chemistry, Optical lithography, Emission spectroscopy, Phase measurement

Showing 5 of 7 publications
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