Dr. Rex B. Anderson
Research Engineer at Micross Components Inc
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Publications (7)

Proceedings Article | 17 December 2003
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Statistical analysis, Diffractive optical elements, Etching, Quartz, Ions, Photomasks, Phase measurement, Reactive ion etching, Plasma, Phase shifts

Proceedings Article | 17 December 2003
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Signal to noise ratio, Principal component analysis, Calibration, Etching, Spectroscopy, Chromium, Neural networks, Photomasks, Charge-coupled devices, Photoresist processing

Proceedings Article | 17 December 2003
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Reticles, Diffractive optical elements, Data modeling, Etching, Dry etching, Photomasks, Critical dimension metrology, Chlorine, Semiconducting wafers, Prototyping

Proceedings Article | 28 August 2003
Proc. SPIE. 5130, Photomask and Next-Generation Lithography Mask Technology X
KEYWORDS: Etching, Manufacturing, Chromium, Oxygen, Photomasks, Plasma etching, Critical dimension metrology, Data centers, Chlorine, Plasma

Proceedings Article | 28 May 2003
Proc. SPIE. 5148, 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents
KEYWORDS: Optical lithography, Etching, Quartz, Chemistry, Emission spectroscopy, Photomasks, Phase measurement, Molybdenum, Fluorine, Phase shifts

Showing 5 of 7 publications
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