Prof. Reza Ghodssi
Associate Professor at Univ of Maryland College Park
SPIE Involvement:
Conference Chair | Author
Publications (6)

Proceedings Article | 19 September 2013
Proc. SPIE. 8820, Nanoepitaxy: Materials and Devices V
KEYWORDS: Gold, Nanostructures, Lithium, Electrodes, Nickel, Photoresist materials, Solids, Atomic layer deposition, Microfabrication, Semiconducting wafers

Proceedings Article | 12 February 2007
Proc. SPIE. 6464, MEMS/MOEMS Components and Their Applications IV
KEYWORDS: Target detection, Microfluidics, Biomedical optics, BioMEMS, Waveguides, Sensors, Electrodes, Polymers, Luminescence, Microfabrication

SPIE Conference Volume | 8 February 2007

Proceedings Article | 7 July 2005
Proc. SPIE. 5840, Photonic Materials, Devices, and Applications
KEYWORDS: Microelectromechanical systems, Actuators, Optical filters, Refractive index, Mirrors, Waveguides, Electrodes, Reflectivity, Tunable filters, Electronic filtering

Proceedings Article | 1 July 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Microelectromechanical systems, Actuators, Etching, Silicon, Photoresist materials, Capacitance, Finite element methods, Photomasks, Deep reactive ion etching, Device simulation

Showing 5 of 6 publications
Conference Committee Involvement (1)
MEMS/MOEMS Components and Their Applications IV Special Focus Topics: Transducers at the Micro-Nano Interface
22 January 2007 | San Jose, California, United States
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