Dr. Richard J. Adamec
Lecturer at Griffith Univ
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 30 December 2008
Proc. SPIE. 7268, Smart Structures, Devices, and Systems IV
KEYWORDS: Thermal sensing, Microelectromechanical systems, Modeling, Sensors, Nickel, Silicon, Bridges, Convection, Chemical elements, Temperature metrology

Proceedings Article | 30 March 2004
Proc. SPIE. 5274, Microelectronics: Design, Technology, and Packaging
KEYWORDS: Sensors, Etching, Resistance, Amplifiers, Control systems, Convection, Velocity measurements, Resistors, Chemical elements, Temperature metrology

Proceedings Article | 19 November 2001
Proc. SPIE. 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II
KEYWORDS: Modeling, Thin films, Optical lithography, Sensors, Etching, Silicon, Resistance, Convection, Thermal modeling, Instrument modeling

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