Dr. Richard J. M. Anderson
at Sandia National Labs California
SPIE Involvement:
Publications (7)

Proceedings Article | 6 May 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Gold, Carbon, Sputter deposition, Ions, Silicon, Xenon, Silicon carbide, Molybdenum, Pulsed laser operation, Plasma

Proceedings Article | 20 May 2004
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Gold, Sputter deposition, Particles, Ions, Silicon, Xenon, Extreme ultraviolet, Extreme ultraviolet lithography, Molybdenum, Plasma

Proceedings Article | 16 June 2003
Proc. SPIE. 5037, Emerging Lithographic Technologies VII
KEYWORDS: Lithography, Reticles, Sensors, Xenon, Projection systems, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, EUV optics, Fiber optic illuminators

Proceedings Article | 1 July 2002
Proc. SPIE. 4688, Emerging Lithographic Technologies VI
KEYWORDS: Lithography, Mirrors, Sensors, Laser energy, High power lasers, Xenon, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma, Liquids

Proceedings Article | 26 August 1999
Proc. SPIE. 3839, Sensor Fusion and Decentralized Control in Robotic Systems II
KEYWORDS: Human-machine interfaces, Switching, Visualization, Imaging systems, Cameras, Sensors, Video, Robotics, Control systems, Prototyping

Proceedings Article | 7 July 1997
Proc. SPIE. 3115, Hard X-Ray and Gamma-Ray Detector Physics, Optics, and Applications
KEYWORDS: Linear polarizers, Sensors, Crystals, Polarizers, Charge-coupled devices, Electro optics, Radiation effects, CCD image sensors, Electro optical modeling, Electric field sensors

Showing 5 of 7 publications
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