Richard L. Barber
Research Student at Swinburne Univ of Technology
SPIE Involvement:
Author
Publications (4)

SPIE Journal Paper | 1 July 2007
JM3 Vol. 6 Issue 03
KEYWORDS: Silicon, Titanium, Gold, Metals, Copper, Chromium, Polymethylmethacrylate, Semiconducting wafers, X-ray lithography, Chemical analysis

Proceedings Article | 2 April 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Gold, Lithography, Polymethylmethacrylate, Ultraviolet radiation, X-rays, Silicon, Photoresist processing, Semiconducting wafers, Radium, X-ray lithography

Proceedings Article | 14 October 2003
Proc. SPIE. 5062, Smart Materials, Structures, and Systems
KEYWORDS: Lithography, Microfluidics, Polymethylmethacrylate, Polymers, Ultraviolet radiation, Silicon, Photoresist materials, Photomasks, Excimer lasers, Micromachining

Proceedings Article | 6 April 2001
Proc. SPIE. 4234, Smart Materials
KEYWORDS: Thin films, Microfluidics, Optical spheres, Polymethylmethacrylate, Silica, Metals, Crystals, Silicon, Solids, Liquids

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