Richard Gladhill
Senior Automation Engineer at Toppan Photomasks Inc
SPIE Involvement:
Publications (8)

Proceedings Article | 3 October 2018 Presentation + Paper
Proceedings Volume 10810, 108100Q (2018)
KEYWORDS: Photomasks, Computer aided design, Lithography, Databases, Printing, Manufacturing, Image segmentation, Raster graphics, Data modeling, Electron beams

Proceedings Article | 8 November 2012 Paper
Proceedings Volume 8522, 85220U (2012)
KEYWORDS: Photomasks, Electronic design automation, Semiconducting wafers, Manufacturing, Optical proximity correction, Process control, Lithography, Wafer-level optics, Image processing, Data processing

Proceedings Article | 21 March 2007 Paper
Proceedings Volume 6521, 65211V (2007)
KEYWORDS: Photomasks, Manufacturing, Inspection, Design for manufacturing, Lithography, Lawrencium, Metals, Chemical mechanical planarization, Semiconducting wafers, Design for manufacturability

Proceedings Article | 20 October 2006 Paper
J. Straub, D. Aguilar, P. Buck, D. Dawkins, R. Gladhill, S. Nolke, J. Riddick
Proceedings Volume 6349, 63493W (2006)
KEYWORDS: Inspection, Photomasks, Manufacturing, Defect inspection, Reticles, Electronic design automation, Lithography, Optical proximity correction, Design for manufacturing, Visualization

Proceedings Article | 20 October 2006 Paper
M. Bloecker, R. Gladhill, P. Buck, M. Kempf, D. Aguilar, R. Cinque
Proceedings Volume 6349, 63490Z (2006)
KEYWORDS: Photomasks, Critical dimension metrology, Lithography, Beam shaping, Vestigial sideband modulation, Manufacturing, Electronic design automation, Optical proximity correction, Control systems, Electron beam lithography

Showing 5 of 8 publications
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