Dr. Richard D. Jones
Senior Principal Dev Engineer at Broadcom Inc
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | August 16, 2010
Proc. SPIE. 7789, Laser Beam Shaping XI
KEYWORDS: Optical lithography, Diffractive optical elements, Silica, Etching, Reflectivity, Photoresist materials, Thin film coatings, Photoresist processing, Semiconducting wafers, Binary data

PROCEEDINGS ARTICLE | March 7, 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Semiconductors, Lithography, Lithographic illumination, Custom fabrication, Diffractive optical elements, Etching, Diffusers, Photomasks, Critical dimension metrology, Optics manufacturing

SPIE Journal Paper | March 1, 2007
OE Vol. 46 Issue 03
KEYWORDS: Polarizers, Diffraction gratings, Silicon, Polarization, Antireflective coatings, Diffraction, Prototyping, Reflection, Optical design, Etching

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top