Dr. Richard Koops
at NMi-IMT
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 20 November 2003
Proc. SPIE. 5190, Recent Developments in Traceable Dimensional Measurements II
KEYWORDS: Human-machine interfaces, Digital signal processing, Modulation, Photodiodes, Frequency combs, Signal processing, Process control, Laser stabilization, Iodine cells, Absorption

Proceedings Article | 20 November 2003
Proc. SPIE. 5190, Recent Developments in Traceable Dimensional Measurements II
KEYWORDS: Mirrors, Clocks, Interferometers, Scanners, Control systems, Atomic force microscopy, Head, Feedback loops, Feedback control, Scanning probe microscopes

Proceedings Article | 20 November 2003
Proc. SPIE. 5190, Recent Developments in Traceable Dimensional Measurements II
KEYWORDS: Nanotechnology, Calibration, Image processing, Inspection, Image analysis, Data acquisition, 3D metrology, Scanning probe microscopy, Scanning tunneling microscopy, Scanning probe microscopes

Proceedings Article | 22 October 2001
Proc. SPIE. 4401, Recent Developments in Traceable Dimensional Measurements
KEYWORDS: Microscopes, Mirrors, Mach-Zehnder interferometers, Interferometers, Calibration, Error analysis, Mercury, Wavefronts, Laser stabilization, Objectives

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