Dr. Richard A. Lawson
Research Engineer at Milliken & Co
SPIE Involvement:
Author
Publications (52)

SPIE Journal Paper | October 27, 2017
JM3 Vol. 16 Issue 04
KEYWORDS: Line edge roughness, Line width roughness, Optical lithography, Double patterning technology, Interfaces, Directed self assembly, Polymers, Polymerization, Etching, Chemical species

SPIE Journal Paper | May 10, 2016
JM3 Vol. 15 Issue 02
KEYWORDS: Directed self assembly, Thermodynamics, Polymers, Interfaces, Computer simulations, Polymerization, Systems modeling, Binary data, Thin films, Semiconductors

SPIE Journal Paper | March 8, 2016
JM3 Vol. 15 Issue 01
KEYWORDS: Directed self assembly, Thin films, Interfaces, Polymers, Annealing, Diffusion, Scattering, Computer simulations, Process control

PROCEEDINGS ARTICLE | March 20, 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Polymers, Glasses, Molecules, Silicon, Scanning electron microscopy, Polymerization, Line edge roughness, Semiconducting wafers, Photoresist developing, Standards development

PROCEEDINGS ARTICLE | March 20, 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Lithography, Light sources, Optical lithography, Polymers, Glasses, Diffusion, Scanning electron microscopy, Polymerization, Extreme ultraviolet, Extreme ultraviolet lithography

PROCEEDINGS ARTICLE | March 20, 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Oxides, Switches, Optical lithography, Polymers, Glasses, Molecules, Silicon, Polymerization, Extreme ultraviolet, Standards development

Showing 5 of 52 publications
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