Richard Lewington
Sales Representative at Applied Materials Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 May 2006
Proc. SPIE. 6283, Photomask and Next-Generation Lithography Mask Technology XIII
KEYWORDS: Data mining, Principal component analysis, Statistical analysis, Sensors, Etching, Interfaces, Data acquisition, Process control, Photomasks, Zoom lenses

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