Dr. Richard A. Plass Profile

Dr. Richard A. Plass

Sr. Member of Technical Staff at Sandia National Labs

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 23 December 2003 Paper

Electrothermal actuator reliability studies

Richard Plass, Michael Baker, Jeremy Walraven

Proceedings Volume 5343, (2003) https://doi.org/10.1117/12.530936

KEYWORDS: Actuators, Thermal modeling, Reliability, Scanning electron microscopy, Silicon, Resistance, Photomicroscopy, Microelectromechanical systems, Modulation, Data modeling

Read Abstract +

Proceedings Article | 23 December 2003 Paper

Unified characterization of surfaces and gases in MEMS devices

Steven Thornberg, Kevin Zavadil, James Ohlhausen, Michael Keenan, Diane Peebles, Gerald Knorovsky, Danny MacCallum, Brooke Nowak-Neely, Ion Abraham, Richard Plass

Proceedings Volume 5343, (2003) https://doi.org/10.1117/12.524777

KEYWORDS: Chemical analysis, Silicon, Microelectromechanical systems, Ions, Microsystems, Pulmonary function tests, Gases, Aluminum, Reliability, Sodium

Read Abstract +

Proceedings Article | 16 January 2003 Paper

Vapor deposition of amino-functionalized self-assembled monolayers on MEMS

Matthew Hankins, Paul Resnick, Peggy Clews, Thomas Mayer, David Wheeler, Danelle Tanner, Richard Plass

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.478206

KEYWORDS: Coating, Microelectromechanical systems, Silicon, Humidity, Nitrogen, Self-assembled monolayers, Liquids, Semiconducting wafers, Molecules, Oxides

Read Abstract +

Proceedings Article | 16 January 2003 Paper

Anodic oxidation-induced delamination of the SUMMiT poly 0 to silicon nitride interface

Richard Plass, Jeremy Walraven, Danelle Tanner, Frederick Sexton

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.476366

KEYWORDS: Electrodes, Silicon, Interfaces, Oxides, Microelectromechanical systems, Humidity, Scanning electron microscopy, Photomicroscopy, Oxygen, Oxidation

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years