Richard L. Sun
President
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 22 January 2005
Proc. SPIE. 5715, Micromachining and Microfabrication Process Technology X
KEYWORDS: Mirrors, Thin films, Ellipsometry, Microopto electromechanical systems, Thin film devices, Reflectometry, Nondestructive evaluation, Mathematical modeling, Reflection, Optical properties

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