Dr. Richard J. Young
Technology Manager at Thermo Fisher Scientific Inc
SPIE Involvement:
Author
Publications (4)

SPIE Journal Paper | 17 January 2014
JM3 Vol. 13 Issue 01
KEYWORDS: Failure analysis, Silicon, Polishing, Metrology, Ion beams, 3D metrology, Scanning electron microscopy, Inspection, Xenon, Ions

Proceedings Article | 5 April 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Metrology, Copper, Ions, Inspection, Scanning electron microscopy, Xenon, Ion beams, Plating, Semiconducting wafers, Plasma

Proceedings Article | 22 May 2009
Proc. SPIE. 7378, Scanning Microscopy 2009
KEYWORDS: Chromatic aberrations, Monochromatic aberrations, Imaging systems, Sensors, Magnetism, Image resolution, Scanning electron microscopy, Transmission electron microscopy, Monochromators, Acoustics

Proceedings Article | 22 May 2009
Proc. SPIE. 7378, Scanning Microscopy 2009
KEYWORDS: Chromatic aberrations, Electron beams, Contamination, Sensors, Crystals, Image resolution, Electron microscopes, Scanning electron microscopy, Monochromators, Scanning transmission electron microscopy

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