Mr. Rico Bohme Profile

Rico Bohme

at Leibniz-Institut für Oberflächenmodifizierung eV

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Publications (3)

PROCEEDINGS ARTICLE | June 14, 2006

Direct laser etching of transparent materials: high quality surface patterning and figuring for micro-optical applications

Proc. SPIE. 6254, Seventh International Conference on Correlation Optics

KEYWORDS: Silica, Etching, Laser processing, Laser applications, Surface roughness, Atomic force microscopy, Scanning electron microscopy, Laser ablation, Pulsed laser operation, Diffraction gratings

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PROCEEDINGS ARTICLE | April 18, 2006

Laser etching of periodic 1D- and 2D-submicron relief gratings on prestructured fused silica surface

Proc. SPIE. 6182, Photonic Crystal Materials and Devices III (i.e. V)

KEYWORDS: Silica, Etching, Interfaces, Diffusion, Laser processing, Surface roughness, Laser ablation, Solids, Pulsed laser operation, Liquids

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PROCEEDINGS ARTICLE | April 24, 2003

Microstructuring of Pyrex glass and polymers by excimer laser

Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS

KEYWORDS: Polymethylmethacrylate, Microsystems, Polymers, Glasses, Laser processing, Laser drilling, Bridges, Excimer lasers, Semiconducting wafers, Pulsed laser operation

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