Rico Bohme
at Leibniz-Institut für Oberflächenmodifizierung eV
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 14 June 2006
Proc. SPIE. 6254, Seventh International Conference on Correlation Optics
KEYWORDS: Silica, Etching, Laser processing, Laser applications, Surface roughness, Atomic force microscopy, Scanning electron microscopy, Laser ablation, Pulsed laser operation, Diffraction gratings

Proceedings Article | 18 April 2006
Proc. SPIE. 6182, Photonic Crystal Materials and Devices III (i.e. V)
KEYWORDS: Silica, Etching, Interfaces, Diffusion, Laser processing, Surface roughness, Laser ablation, Solids, Pulsed laser operation, Liquids

Proceedings Article | 24 April 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Polymethylmethacrylate, Microsystems, Polymers, Glasses, Laser processing, Laser drilling, Bridges, Excimer lasers, Semiconducting wafers, Pulsed laser operation

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