Rinu Abraham Maniyara
PhD Student at ICFO- The Institute Of Photonic Sciences
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 16 October 2017 Paper
Proceedings Volume 10451, 104511S (2017) https://doi.org/10.1117/12.2280526
KEYWORDS: Coating, Photomasks, Chromium, Extreme ultraviolet, Nickel, Metals, Resistance, Multilayers, Electrodes, Extreme ultraviolet lithography

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