Dr. Risaku Toda
Engineering Staff Member at Jet Propulsion Lab
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | February 17, 2010
Proc. SPIE. 7594, MOEMS and Miniaturized Systems IX
KEYWORDS: Carbon, Electronics, Logic, Switching, Aerospace engineering, X-rays, Electronic components, Logic devices, Digital electronics, Carbon nanotubes

PROCEEDINGS ARTICLE | April 30, 2008
Proc. SPIE. 6959, Micro (MEMS) and Nanotechnologies for Space, Defense, and Security II
KEYWORDS: Aerospace engineering, Sputter deposition, Electrodes, Spectroscopy, X-rays, Copper, Scanning electron microscopy, Photomicroscopy, Commercial off the shelf technology, Carbon nanotubes

PROCEEDINGS ARTICLE | April 27, 2007
Proc. SPIE. 6556, Micro (MEMS) and Nanotechnologies for Defense and Security
KEYWORDS: Actuators, Mirrors, Ferroelectric materials, Electrodes, Silicon, Wavefronts, Microactuators, Space telescopes, Connectors, Semiconducting wafers

PROCEEDINGS ARTICLE | July 1, 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Microelectromechanical systems, Minerals, Resonators, Sensors, Spectroscopy, X-rays, Magnetism, Magnetic sensors, X-ray fluorescence spectroscopy, Astrobiology

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5717, MEMS/MOEMS Components and Their Applications II
KEYWORDS: Actuators, Ferroelectric materials, Electrodes, Silicon, Microactuators, Space telescopes, Relays, Deep reactive ion etching, Reactive ion etching, Semiconducting wafers

PROCEEDINGS ARTICLE | September 2, 1998
Proc. SPIE. 3513, Microelectronic Structures and MEMS for Optical Processing IV
KEYWORDS: Thin films, Etching, Metals, Ions, Silicon, Photomasks, Aluminum, Reactive ion etching, Semiconducting wafers, Camera shutters

Showing 5 of 6 publications
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