Dr. Rob P. Meagley
CEO/CTO at ONE Nanotechnologies LLC
SPIE Involvement:
Author
Publications (13)

Proceedings Article | 30 March 2007 Paper
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Polymers, Scanning electron microscopy, Photoresist materials, Solids, Extreme ultraviolet, Extreme ultraviolet lithography, Photoresist processing, Semiconducting wafers, Photoresist developing, Standards development

Proceedings Article | 21 March 2007 Paper
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Lithography, Deep ultraviolet, Polymers, Interfaces, Ions, Diffusion, Silver, Photoresist materials, Extreme ultraviolet lithography, Semiconducting wafers

Proceedings Article | 19 March 2007 Paper
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Lithography, Nanostructures, Lithium, Polymers, Molecules, Chemistry, Photoresist materials, Dendrimers, Chemical elements, Analog electronics

SPIE Journal Paper | 1 October 2006
JM3 Vol. 5 Issue 04
KEYWORDS: Polymers, Surface roughness, Polymer thin films, Line edge roughness, Line width roughness, Photoresist processing, Profiling, Atomic force microscopy, Semiconducting wafers, Lithography

Proceedings Article | 29 March 2006 Paper
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Lithography, FT-IR spectroscopy, Polymers, Surface roughness, Atomic force microscopy, Line width roughness, Extreme ultraviolet lithography, Semiconducting wafers, Photolysis, Standards development

Showing 5 of 13 publications
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