Dr. Rob Snijkers
at Philips Technologie GmbH
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 18, 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Curtains, Electrodes, Scanners, Reliability, Xenon, Extreme ultraviolet, Integrated optics, Extreme ultraviolet lithography, Plasma, Tin

PROCEEDINGS ARTICLE | March 27, 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Lithography, Capacitors, Electrodes, Ultraviolet radiation, Extreme ultraviolet, Extreme ultraviolet lithography, Pulsed laser operation, Astatine, Plasma, Tin

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top