Dr. Rob W. van der Heijden Profile

Dr. Rob W. van der Heijden

Associate Professor at Technische Univ Eindhoven

SPIE Involvement:

Author

Publications (14)

PROCEEDINGS ARTICLE | September 19, 2017

Single photons from electrically driven reconfigurable photonic crystal cavities (Conference Presentation)

Proc. SPIE. 10358, Quantum Photonic Devices

KEYWORDS: Light emitting diodes, Photons, Quantum efficiency, Single photon, Photonic crystals, Quantum dots, Integrated optics, Photonic integrated circuits, Quantum optics, Bosons

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PROCEEDINGS ARTICLE | July 26, 2016

High-resolution spectral and displacement sensing using nano-opto-electro-mechanical systems (Conference Presentation)

Proc. SPIE. 9884, Nanophotonics VI

KEYWORDS: Atomic, molecular, and optical physics, Optical sensing, Waveguides, Photonic crystals, Spectral resolution, Sensing systems, Integrated optics, Nanophotonics, Current controlled current source

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SPIE Journal Paper | March 29, 2016

High-order distortion control using a computational prediction method for device overlay

Kang, Young Seog , Affentauschegg, Cedric , Mulkens, Jan , Kim, Jang-Sun , Shin, Ju Hee , Kim, Young Ha , Nam, YoungSun , Choi, Young-Sin , Ha, Hunhwan , Lee, Dong-Han , Lee, Jae-il , Rizvi, Umar , Geh, Bernd , van der Heijden, Rob , Baselmans, Jan , Kwon, Oh-Sung

JM3 Vol. 15 Issue 02

KEYWORDS: Overlay metrology, Metrology, Distortion, Control systems, Semiconducting wafers, Scanners, Etching, Information technology, Image processing, Photomasks

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PROCEEDINGS ARTICLE | March 18, 2015

Solution for high-order distortion on extreme illumination condition using computational prediction method

Proc. SPIE. 9426, Optical Microlithography XXVIII

KEYWORDS: Metrology, Data modeling, Calibration, Etching, Image processing, Distortion, Measurement devices, Photomasks, Overlay metrology, Instrument modeling

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PROCEEDINGS ARTICLE | April 25, 2012

Luminescent photonic crystal cavities for fiber-optic sensors, coupled dissimilar cavities and optofluidics

Proc. SPIE. 8425, Photonic Crystal Materials and Devices X

KEYWORDS: Refractive index, Microfluidics, Waveguides, Sensors, Glasses, Particles, Photonic crystals, Fiber optics sensors, Scanning electron microscopy, Liquids

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PROCEEDINGS ARTICLE | March 1, 2011

InGaAsP photonic crystal slot nanobeam waveguides for refractive index sensing

Proc. SPIE. 7946, Photonic and Phononic Properties of Engineered Nanostructures

KEYWORDS: Refractive index, Mirrors, Slow light, Waveguides, Sensors, Water, Luminescence, Photonic crystals, Scanning electron microscopy, Liquids

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PROCEEDINGS ARTICLE | May 13, 2010

Activating photonic crystal membrane nanocavities by infiltrating with liquid crystals or luminescent colloidal nanocrystals

Proc. SPIE. 7713, Photonic Crystal Materials and Devices IX

KEYWORDS: Semiconductors, Refractive index, Indium arsenide, Thermal optics, Photonic crystals, Quantum dots, Liquid crystals, Nanocrystals, Temperature metrology, Liquids

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SPIE Journal Paper | April 1, 2009

Lithographic and optical tuning of InGaAsP membrane photonic crystal nanocavities with embedded InAs quantum dots

Dundar, Mehmet , Bordas, Frederic , Eijkemans, Tom , Chauvin, Nicolas , Silov, Andrei , Nötzel, Richard , Karouta, Fouad , Fiore, Andrea , van der Heijden, Rob

JNP Vol. 3 Issue 01

KEYWORDS: Lithography, Photonic crystals, Indium arsenide, Quantum dots, Refractive index, Luminescence, Quantum wells, Electron beam lithography, Scanning electron microscopy, Continuous wave operation

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PROCEEDINGS ARTICLE | February 14, 2009

Tuning of narrow-bandwidth photonic crystal devices etched in InGaAsP planar waveguides by liquid crystal infiltration

Proc. SPIE. 7223, Photonic and Phononic Crystal Materials and Devices IX

KEYWORDS: Refractive index, Waveguides, Cladding, Etching, Light scattering, Scanning electron microscopy, Near field scanning optical microscopy, Liquid crystals, Planar waveguides, Photonic integrated circuits

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PROCEEDINGS ARTICLE | August 31, 2006

2D InP photonic crystal fabrication process development

Proc. SPIE. 6327, Nanoengineering: Fabrication, Properties, Optics, and Devices III

KEYWORDS: Waveguides, Etching, Dry etching, Ions, Photonic crystals, Atomic force microscopy, Wet etching, Plasma etching, Chlorine, Plasma

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PROCEEDINGS ARTICLE | August 30, 2006

InP-based planar photonic crystals infiltrated with solid polymers and liquid crystals

Proc. SPIE. 6322, Tuning the Optic Response of Photonic Bandgap Structures III

KEYWORDS: Refractive index, Polymers, Crystals, Photonic crystals, Scanning electron microscopy, Solids, Liquid crystals, Polymerization, Dielectric polarization, Liquids

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PROCEEDINGS ARTICLE | April 20, 2006

Two-dimensional photonic crystals from semiconductor material with polymer filled holes

Proc. SPIE. 6182, Photonic Crystal Materials and Devices III (i.e. V)

KEYWORDS: Refractive index, Waveguides, Etching, Polymers, Inspection, Photonic crystals, Optical testing, Scanning electron microscopy, Polymerization, Liquids

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PROCEEDINGS ARTICLE | April 20, 2006

Two-dimensional photonic crystals from semiconductor material with polymer filled holes

Proc. SPIE. 6182, Photonic Crystal Materials and Devices III (i.e. V)

KEYWORDS: Refractive index, Waveguides, Etching, Polymers, Inspection, Photonic crystals, Optical testing, Scanning electron microscopy, Polymerization, Liquids

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PROCEEDINGS ARTICLE | September 15, 2004

Deep dry etching process development for photonic crystals in InP-based planar waveguides

Proc. SPIE. 5450, Photonic Crystal Materials and Nanostructures

KEYWORDS: Etching, Ions, Photonic crystals, Photomasks, Wet etching, Planar waveguides, Reactive ion etching, Chlorine, Temperature metrology, Protactinium

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Showing 5 of 14 publications

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