Dr. Robert D. Allen
Research Scientist at IBM Research - Almaden
SPIE Involvement:
Fellow status | Conference Program Committee | Symposium Committee | Conference Chair | Conference Co-Chair | Author
Publications (63)

PROCEEDINGS ARTICLE | October 9, 2018
Proc. SPIE. 10795, Electro-Optical and Infrared Systems: Technology and Applications XV
KEYWORDS: Staring arrays, Readout integrated circuits, Infrared detectors, Sensors, Capillaries, Microelectronics, Epoxies, Adhesives, Cryogenics, Liquids

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Lithography, Optical lithography, Polymers, Molecules, Silicon, Image resolution, Scanning probe lithography, Scanning electron microscopy, Photomasks, Nanolithography

SPIE Conference Volume | April 18, 2011

PROCEEDINGS ARTICLE | April 16, 2011
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Lithography, Electron beam lithography, Polymers, Glasses, Spectroscopy, Image resolution, Atomic force microscopy, Extreme ultraviolet, Extreme ultraviolet lithography, Line edge roughness

PROCEEDINGS ARTICLE | April 16, 2011
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Lithography, Electron beam lithography, Optical lithography, Scanners, Copper, Dielectrics, Silicon, Scanning electron microscopy, Photomasks, Back end of line

PROCEEDINGS ARTICLE | March 26, 2010
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Optical lithography, Polymers, Ultraviolet radiation, Copper, Dielectrics, Silicon, Manufacturing, Scanning electron microscopy, Semiconducting wafers, Back end of line

Showing 5 of 63 publications
Conference Committee Involvement (19)
Advances in Patterning Materials and Processes XXXVI
25 February 2019 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXV
27 February 2018 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXIV
28 February 2017 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXIII
29 February 2016 | San Jose, California, United States
SPIE Advanced Lithography
21 February 2016 | San Jose, United States
Showing 5 of 19 published special sections
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