Dr. Robert D. Allen
Research Scientist at IBM Research - Almaden
SPIE Involvement:
Conference Program Committee | Author
Publications (58)

Proceedings Article | 9 October 2018 Presentation + Paper
Proc. SPIE. 10795, Electro-Optical and Infrared Systems: Technology and Applications XV
KEYWORDS: Staring arrays, Readout integrated circuits, Infrared detectors, Sensors, Capillaries, Microelectronics, Epoxies, Adhesives, Cryogenics, Liquids

Proceedings Article | 28 March 2014 Paper
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Lithography, Optical lithography, Polymers, Molecules, Silicon, Image resolution, Scanning probe lithography, Scanning electron microscopy, Photomasks, Nanolithography

Proceedings Article | 16 April 2011 Paper
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Lithography, Electron beam lithography, Polymers, Glasses, Spectroscopy, Image resolution, Atomic force microscopy, Extreme ultraviolet, Extreme ultraviolet lithography, Line edge roughness

Proceedings Article | 16 April 2011 Paper
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Lithography, Electron beam lithography, Optical lithography, Scanners, Copper, Dielectrics, Silicon, Scanning electron microscopy, Photomasks, Back end of line

Proceedings Article | 26 March 2010 Paper
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Optical lithography, Polymers, Ultraviolet radiation, Copper, Dielectrics, Silicon, Manufacturing, Scanning electron microscopy, Semiconducting wafers, Back end of line

Showing 5 of 58 publications
Proceedings Volume Editor (5)

SPIE Conference Volume | 18 April 2011

SPIE Conference Volume | 3 March 2010

SPIE Conference Volume | 30 March 2009

SPIE Conference Volume | 24 April 2008

SPIE Conference Volume | 9 June 1995

Conference Committee Involvement (21)
Advances in Patterning Materials and Processes XXXVIII
21 February 2021 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXVII
24 February 2020 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXVI
25 February 2019 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXV
27 February 2018 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXIV
28 February 2017 | San Jose, California, United States
Showing 5 of 21 Conference Committees
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