Robert C. Anderson
at Sandia National Labs
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 17, 2005
Proc. SPIE. 5765, Smart Structures and Materials 2005: Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems
KEYWORDS: Microelectromechanical systems, Oxides, Capacitors, Sensors, Electrodes, Amplifiers, Capacitance, Feedback control, Device simulation, Nonlinear control

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