Dr. Robert L. Brainard
Professor at SUNY Polytechnic
SPIE Involvement:
Conference Program Committee | Author
Publications (53)

SPIE Journal Paper | December 19, 2018
JM3 Vol. 17 Issue 04
KEYWORDS: Extreme ultraviolet, Cobalt, Extreme ultraviolet lithography, Chromium, Metals, Photolysis, Solids, Iron, Electrons, Carbon monoxide

SPIE Journal Paper | July 23, 2018
JM3 Vol. 17 Issue 03
KEYWORDS: Polymers, Extreme ultraviolet lithography, Extreme ultraviolet, Photoresist materials, Molecules, Absorbance, Chemical reactions, Absorption, Spectroscopy, Electrodes

PROCEEDINGS ARTICLE | March 28, 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Polymers, Photons, Ionizing radiation, Electrons, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography, Radiation effects, Photoresist developing, Standards development

PROCEEDINGS ARTICLE | March 27, 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Metals, Chromium, Photoresist materials, Extreme ultraviolet, Bismuth, Extreme ultraviolet lithography, Semiconducting wafers, Carbon monoxide, Antimony, Tellurium

PROCEEDINGS ARTICLE | March 27, 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Spectroscopy, Molecules, Hydrogen, Chromium, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Carbon monoxide, Antimony

PROCEEDINGS ARTICLE | March 21, 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Polymethylmethacrylate, Polymers, Molecules, Electrons, Photoresist materials, Extreme ultraviolet, Absorbance, Extreme ultraviolet lithography, Liquids, Absorption

Showing 5 of 53 publications
Conference Committee Involvement (10)
Extreme Ultraviolet (EUV) Lithography X
25 February 2019 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography IX
26 February 2018 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography VIII
27 February 2017 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography VII
22 February 2016 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography VI
23 February 2015 | San Jose, California, United States
Showing 5 of 10 published special sections
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