Robert Brandom
Technical Sales Support Manager at Nanometrics Inc
SPIE Involvement:
Author
Publications (7)

PROCEEDINGS ARTICLE | June 2, 2003
Proc. SPIE. 5038, Metrology, Inspection, and Process Control for Microlithography XVII
KEYWORDS: Lithography, Electron beams, Metrology, Scanning electron microscopy, Chemical analysis, Critical dimension metrology, Photoresist processing, Semiconducting wafers, 193nm lithography, Temperature metrology

PROCEEDINGS ARTICLE | June 2, 2003
Proc. SPIE. 5038, Metrology, Inspection, and Process Control for Microlithography XVII
KEYWORDS: Internet, Metrology, Databases, Pattern recognition, Diagnostics, Scanning electron microscopy, Image quality, Process control, Data communications, Computer security

PROCEEDINGS ARTICLE | June 2, 2003
Proc. SPIE. 5038, Metrology, Inspection, and Process Control for Microlithography XVII
KEYWORDS: Electron beams, Metrology, Contamination, Data modeling, Atomic force microscopy, Scanning electron microscopy, Process control, Critical dimension metrology, Semiconducting wafers, Systems modeling

PROCEEDINGS ARTICLE | June 2, 2003
Proc. SPIE. 5038, Metrology, Inspection, and Process Control for Microlithography XVII
KEYWORDS: Electron beams, Metrology, Diffractive optical elements, Image acquisition, Scanning electron microscopy, Process control, Transistors, Critical dimension metrology, Line edge roughness, Semiconducting wafers

PROCEEDINGS ARTICLE | August 22, 2001
Proc. SPIE. 4344, Metrology, Inspection, and Process Control for Microlithography XV
KEYWORDS: Lithography, Reticles, Metrology, Optical lithography, Cadmium, Photomasks, Critical dimension metrology, Semiconducting wafers, Resolution enhancement technologies, Phase shifts

PROCEEDINGS ARTICLE | July 5, 2000
Proc. SPIE. 4000, Optical Microlithography XIII
KEYWORDS: Lithography, Deep ultraviolet, Etching, Scanning electron microscopy, Photomasks, Transistors, Plasma etching, Mask making, Resolution enhancement technologies, Plasma

Showing 5 of 7 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top