Dr. Robert L. Bristol
Process Engineer at Intel Corp
SPIE Involvement:
Publications (36)

SPIE Journal Paper | 19 September 2017
JM3 Vol. 16 Issue 03
KEYWORDS: Lithography, Stochastic processes, Microelectromechanical systems, Microopto electromechanical systems

SPIE Journal Paper | 12 June 2017
JM3 Vol. 16 Issue 02
KEYWORDS: Lithography, Statistical analysis, Stochastic processes, Photons, Critical dimension metrology, Cadmium, Extreme ultraviolet lithography, Extreme ultraviolet, Quenching (fluorescence), Scanners

Proceedings Article | 24 March 2017 Presentation + Paper
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Lithography, Electron beams, Statistical analysis, Photons, Photoresist materials, Extreme ultraviolet, Cadmium sulfide, Extreme ultraviolet lithography, Critical dimension metrology, Semiconducting wafers, Stochastic processes, Quenching (fluorescence)

SPIE Journal Paper | 5 February 2015
JM3 Vol. 14 Issue 01
KEYWORDS: Polymethylmethacrylate, Thermal effects, Critical dimension metrology, Error analysis, Lithography, Overlay metrology, Picosecond phenomena, Polymers, Directed self assembly

Proceedings Article | 28 March 2014 Paper
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Lithography, Polymethylmethacrylate, Cadmium, Polymers, Error analysis, Computer simulations, Thermal effects, Directed self assembly, Picosecond phenomena, Critical dimension metrology

Showing 5 of 36 publications
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