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Rob Crowell
Product Marketing Manager at Tokyo Electron America Inc
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Publications (3)
Proceedings Article | 12 July 2002 Paper
Wafer-level fault detection and classification on a photo track in a high volume fab
Timothy Jackson, Richard Markle, Clinton Miller, Edward Stewart, Robert Crowell
Proceedings Volume 4692, (2002) https://doi.org/10.1117/12.475649
KEYWORDS: Semiconducting wafers, Control systems, Sensors, Semiconductors, Manufacturing, Data acquisition, Optical inspection, Scanning electron microscopy, High volume manufacturing, Metrology
Proceedings Article | 5 June 1998 Paper
Determining photoresist coat sensitivities of 300-mm wafers
Proceedings Volume 3331, (1998) https://doi.org/10.1117/12.309595
KEYWORDS: Semiconducting wafers, Photoresist materials, Thin film coatings, Humidity, Integrated circuits, Control systems, Optical lithography, Image processing, Process control, Photoresist developing
Proceedings Article | 1 December 1991 Paper
Time-resolved photon echo and fluorescence anisotropy study of organically doped sol-gel glasses
Eric Chronister, Drew L'Esperance, John Pelo, John Middleton, Robert Crowell
Proceedings Volume 1559, (1991) https://doi.org/10.1117/12.50657
KEYWORDS: Glasses, Sol-gels, Chromophores, Temperature metrology, Fluorescence anisotropy, Luminescence, Anisotropy, Molecules, Hole burning spectroscopy, Energy transfer
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