Rob Crowell
Product Marketing Manager at Tokyo Electron America Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 12 July 2002
Proc. SPIE. 4692, Design, Process Integration, and Characterization for Microelectronics
KEYWORDS: Semiconductors, Metrology, Sensors, Manufacturing, Control systems, Scanning electron microscopy, Optical inspection, Data acquisition, High volume manufacturing, Semiconducting wafers

Proceedings Article | 5 June 1998
Proc. SPIE. 3331, Emerging Lithographic Technologies II
KEYWORDS: Optical lithography, Image processing, Control systems, Photoresist materials, Humidity, Process control, Integrated circuits, Thin film coatings, Semiconducting wafers, Photoresist developing

Proceedings Article | 1 December 1991
Proc. SPIE. 1559, Photopolymer Device Physics, Chemistry, and Applications II
KEYWORDS: Glasses, Luminescence, Molecules, Energy transfer, Fluorescence anisotropy, Chromophores, Sol-gels, Hole burning spectroscopy, Temperature metrology, Anisotropy

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