Robert D. Frankel
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 26 March 2007
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Lithography, Diffraction, Optical lithography, Deep ultraviolet, Microscopy, Interferometry, Photoresist materials, Double patterning technology, Stimulated emission depletion microscopy, Diffraction gratings

Proceedings Article | 29 December 2003
Proc. SPIE. 5184, Physics, Theory, and Applications of Periodic Structures in Optics II
KEYWORDS: Diffraction, Optical design, Polarization, Etching, Crystals, Silicon, Manufacturing, Wavelength division multiplexing, Aluminum, Diffraction gratings

Proceedings Article | 24 June 1993
Proc. SPIE. 1924, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III
KEYWORDS: Lithography, Capillaries, X-rays, X-ray sources, Printing, Collimators, Collimation, Semiconducting wafers, X-ray lithography, Plasma

Proceedings Article | 1 May 1990
Proc. SPIE. 1263, Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies IX
KEYWORDS: Gold, Lithography, Reticles, Optical lithography, X-rays, Scanning electron microscopy, Latex, X-ray lithography, X-ray technology, Absorption

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