Dr. Robert E. Geer
at SUNY/Univ at Albany
SPIE Involvement:
Conference Chair | Conference Program Committee | Author
Publications (16)

PROCEEDINGS ARTICLE | October 20, 2006
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Optical spheres, Quartz, Particles, Chemistry, Surface roughness, Chromium, Atomic force microscopy, Photomasks, Extreme ultraviolet lithography, Mask cleaning

SPIE Journal Paper | April 1, 2006
JM3 Vol. 5 Issue 02
KEYWORDS: Zinc oxide, Actuators, Semiconducting wafers, Ultrasonics, Scanning probe microscopy, Etching, Electrodes, Oxides, Imaging systems, Silicon

PROCEEDINGS ARTICLE | May 9, 2005
Proc. SPIE. 5766, Testing, Reliability, and Application of Micro- and Nano-Material Systems III
KEYWORDS: Actuators, Etching, Electrodes, Metals, Silicon, Ultrasonics, Photomasks, Scanning probe microscopy, Zinc oxide, Semiconducting wafers

PROCEEDINGS ARTICLE | May 9, 2005
Proc. SPIE. 5766, Testing, Reliability, and Application of Micro- and Nano-Material Systems III
KEYWORDS: Metrology, Photons, Silicon, Silver, Raman spectroscopy, Imaging devices, Near field scanning optical microscopy, Near field, Raman scattering, Spatial resolution

Showing 5 of 16 publications
Conference Committee Involvement (3)
Testing, Reliability, and Application of Micro- and Nano-Material Systems IV
1 March 2006 | San Diego, CA, United States
Testing, Reliability, and Application of Micro- and Nano-Material Systems III
9 March 2005 | San Diego, CA, United States
Testing, Reliability, and Application of Micro-and Nano-Material Systems II
15 March 2004 | San Diego, CA, United States
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