Robert L. Jones
Research Scientist
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 26 June 2003
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Lithography, Reticles, Data modeling, Imaging systems, Diffusion, Computer simulations, Scanning electron microscopy, Photomasks, Convolution, Process modeling

Proceedings Article | 2 June 2003
Proc. SPIE. 5038, Metrology, Inspection, and Process Control for Microlithography XVII
KEYWORDS: Lithography, Metrology, Cadmium, Data modeling, Calibration, Computer simulations, Scanning electron microscopy, Monte Carlo methods, Shape analysis, Line scan image sensors

Proceedings Article | 30 July 2002
Proc. SPIE. 4691, Optical Microlithography XV
KEYWORDS: Lithography, Metrology, Cadmium, Data modeling, Etching, Sputter deposition, Ions, Silicon, Wavefronts, Visibility

Proceedings Article | 22 August 2001
Proc. SPIE. 4344, Metrology, Inspection, and Process Control for Microlithography XV
KEYWORDS: Lithography, Reticles, Edge detection, Metrology, Etching, Image processing, Scanning electron microscopy, Shape analysis, Line edge roughness, Semiconducting wafers

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